USC Biomedical Microsystems Laboratory

2020

W. Jiang, X. Wang, H. Xu, E. Meng, and D. Song, "A 3D PARYLENE-BASED MULTI-ELECTRODE ARRAY FOR LARGE SCALE RECORDINGS FROM THE RAT HIPPOCAMPUS," Neuromatch 3.0 Conference, October 26-30, 2020. (online)

H. Xu, A. Hirschberg, W. Jiang, K. Scholten, X. Wang, E. Meng, and D. Song, "CHRONIC RECORDING FROM MULTIPLE HIPPOCAMPAL SUB-REGIONS IN FREE MOVING RATS WITH A FLEXIBLE PARYLENE-BASED MULTI-ELECTRODES ARRAY," Neuromatch 3.0 Conference, October 26-30, 2020. (online)

E. Yoon, B. Koo, J. Wong, S. Elyahoodayan, J.D. Weiland, C.D. Lee, A. Petrossians, and E. Meng, "AN IMPLANTABLE MICROELECTRODE ARRAY FOR CHRONIC IN VIVO EPIRETINAL STIMULATION OF THE RAT RETINA," Journal of Micromechanics and Microengineering, Vol. 30, No. 12, 2020.

C. Bettinger, M. Ecker, T. Kozai, G. Malliaras, E. Meng, and W. Voit, "RECENT ADVANCES IN NEURAL INTERFACES – MATERIALS CHEMISTRY TO CLINICAL TRANSLATION," MRS Bulletin, Vol. 45, Issue 8, pp. 655-668, 2020.

X. Wang, A. Weltman Hirschberg, H. Xu, Z. Slingsby-Smith, A. Lecomte, K. Scholten, D. Song, and E. Meng. "A PARYLENE NEURAL PROBE ARRAY FOR MULTI-REGION DEEP BRAIN RECORDINGS," Journal of Microelectromechanical Systems, Vol. 29, Issue 4, pp. 499-513, 2020.

K. Scholten, E. Meng, G. Knaack, and D. Song, "INTERFACING WITH THE PERIPHERAL NERVOUS SYSTEM," Journal of Neuroscience Methods, Vol. 340, Article Number 108745, 2020.

S. Elyahoodayan, C. Larson, A. Cobo, E. Meng, and D. Song, "ACUTE IN VIVO TESTING OF A POLYMER CUFF ELECTRODE WITH INTEGRATED MICROFLUIDIC CHANNELS FOR STIMULATION, RECORDING, AND DRUG DELIVERY EXPERIMENTS ON RAT SCIATIC NERVE," Journal of Neuroscience Methods, Vol. 338, Article Number 108696, 2020.

K. Scholten, C. Larson, H. Xu, D. Song, and E. Meng, "A 512-CHANNEL MULTI-LAYER POLYMER-BASED NEURAL PROBE ARRAY," Journal of Microelectromechanical Systems, vol. 29, no. 5, pp. 1054-1058, 2020.

E. Yoon and E. Meng, "ELECTROLYTIC GENERATION OF TRAPPED MICROBUBBLES VIA NUCLEATION CORE WITH PICOLITER PRECISION," IEEE MEMS 2020, Vancouver, Canada, January 18-22, 2020, pp. 1064-1067.

J. Yoo and E. Meng, "INTEGRATING ACTIVE ICS TO POLYMERS FOR COMPACT PACKAGING," 5th Advanced Technology Workshop on Advanced Packaging for Medical Microelectronics, San Diego, California, January 28-29, 2020.

2019

C. Larson and E. Meng, "A REVIEW FOR THE PERIPHERAL NERVE INTERFACE DESIGNER," Journal of Neuroscience Methods, Vol. 332, Article Number 108523, 2019.

A. Baldwin, E.Yoon, T. Hudson, and E. Meng, "FLUID TEMPERATURE MEASUREMENT IN AQUEOUS SOLUTION VIA ELECTROCHEMICAL IMPEDANCE," IEEE/ASME Journal of Microelectromechanical Systems, Vol. 28, Issue 6, pp. 1060-1067, 2019.

J. Yoo and E. Meng, "FINE-PITCH BONDING METHODS FOR INTEGRATING ASICS WITH FLEXIBLE POLYMER MEMS," Transducers 2019, Berlin, Germany, June 23-27, 2019, pp. 1623-1626.

T. Hudson, A. Baldwin, and E. Meng, "TESTING A MULTI-SENSOR SYSTEM FOR HYDROCEPHALUS MONITORING IN EXTERNAL VENTRICULAR DRAINS," Transducers 2019, Berlin, 2019

T. Hudson, A. Baldwin, and E. Meng, "A CONTINUOUS, DRIFT-COMPENSATED IMPEDIMETRIC THERMAL FLOW SENSOR FOR IN VIVO APPLICATIONS," 2019 IEEE Micro Electro Mechanical Systems (MEMS), Seoul, 2019

A. Cobo, C. Larson, K. Scholten, J. Miranda, S. Elyahoodayan, D. Song, V. Pikov and E. Meng, "PARYLENE-BASED CUFF ELECTRODE WITH INTEGRATED MICROFLUIDICS FOR PERIPHERAL NERVE RECORDING, STIMULATION, AND DRUG DELIVERY," Journal of Microelectromechanical Systems, vol. 28, no. 1, pp. 36–49, Feb. 2019.

E. Yoon, J. Wong, B. Koo, J. Weiland and E. Meng, "BENCHTOP CHARACTERIZATION OF RAT EPIRETINAL STIMULATION ARRAY FOR ARTIFICIAL VISION PROSTHESES," IEEE Engineering in Medicine and Biology Conf., Berlin, Germany, 2019.

G. M. Shackleford, M. Y. Mahdi, R. A. Moats, D. Hawes, H. C. Tran, J. L. Finlay, T. Q. Hoang, E. F. Meng and A. Erdreich-Epstein, "CONTINUOUS AND BOLUS INTRAVENTRICULAR TOPOTECAN PROLONG SURVIVAL IN A MOUSE MODEL OF LEPTOMENINGEAL MEDULLOBLASTOMA," PLoS ONE, Vol. 14, Issue 1, Article Number e0206394, 2019.

G. M. Shackleford, M. Y. Mahdi, R. A. Moats, D. Hawes, H. C. Tran, J. L. Finlay, T. Q. Hoang, E. F. Meng and A. Erdreich-Epstein, "CONTINUOUS AND BOLUS INTRAVENTRICULAR TOPOTECAN PROLONG SURVIVAL IN A MOUSE MODEL OF LEPTOMENINGEAL MEDULLOBLASTOMA," SNO Pediatric Neuro-Oncology Basic and Translational Research Conf., San Francisco, CA, USA, 2019.

J. Yoo and E. Meng, "DIRECT CHIP INTEGRATION INTO FLEXIBLE POLYMER MEMS VIA FINE-PITCH BONDING," Transducers, Berlin, Germany, 2019.

J. Wong, E. Yoon, and E. Meng, "POST-FABRICATION PROCESSING OF A POLYMERIC MICROELECTRODE ARRAY," BMES Annual Fall Meeting, Philadelphia, Pennsylvania, USA, October 16-19, 2019.

2018

J. Ortigoza-Diaz, K. Scholten, C. Larson, A. Cobo, T. Hudson, J. Yoo, A. Baldwin, A. Weltman Hirschberg and E. Meng, "TECHNIQUES AND CONSIDERATIONS IN THE MICROFABRICATION OF PARYLENE C MICROELECTROMECHANICAL SYSTEMS," Micromachines, vol. 9, no. 9, 2018

A. Baldwin and E. Meng, "KIRIGAMI STRAIN SENSORS MICROFABRICATED FROM THIN-FILM PARYLENE C," Journal of Microelectromechanical Systems, vol. 27, no. 6, pp. 1082–1088, Dec. 2018

A. Baldwin, T. Q. Hudson, E. Yoon, and E. Meng, "A FLEXIBLE, MICROFABRICATED IMPEDIMETRIC FLUID TEMPERATURE SENSOR," in 2018 Solid-State, Actuators, and Microsystems Workshop Technical Digest, Hilton Head, South Carolina, USA, 2018, pp. 179–182

J. Ortigoza-Diaz, K. Scholten, and E. Meng, "CHARACTERIZATION AND MODIFICATION OF ADHESION IN DRY AND WET ENVIRONMENTS IN THIN-FILM PARYLENE SYSTEMS," Journal of Microelectromechanical Systems, 2018

A. Baldwin, T. Hudson and E. Meng, "A CALORIMETRIC FLOW SENSOR FOR ULTRA-LOW FLOW APPLICATIONS USING ELECTROCHEMICAL IMPEDANCE," 2018 IEEE Micro Electro Mechanical Systems (MEMS), Belfast, 2018, pp. 361-364.

A. Baldwin, C.D. Lee, A. Petrossians, J. Weiland, and E. Meng, "PLATINUM-IRIDIUM COATINGS FOR INCREASING SENSITIVITY OF IMPEDANCE-BASED POLYMER MICROFLUIDIC SENSORS," in 9th International Conference on Microtechnologies in Medicine and Biology (MMB), Monterrey, CA 2018.

K. Scholten, A. Hirschberg, H. Xu, D. Song, and E. Meng, “FABRICATION AND TESTING OF A POLYMER-BASED MICROELECTRODE ARRAY FOR HIPPOCAMPAL RECORDINGS,” Neural Interfaces Conference, Minneapolis, 2018.

J. J. Yoo and E. Meng, “INTERCONNECT STRATEGIES FOR JOINING INTEGRATED CIRCUITS TO HIGH-DENSITY POLYMER NEURAL INTERFACES,” Neural Interfaces Conference, Minneapolis, 2018.

C. Larson, S. Elyahoodayan, A. Cobo, K. Scholten, D. Song, and E. Meng, “RELIABILITY AND ACUTE IN VIVO TESTING OF THE LYSE-AND- ATTRACT CUFF ELECTRODE,” Neural Interfaces Conference, Minneapolis, 2018.

H. Xu, W. Jiang, A. Hirschberg, K. Scholten, E. Meng and D. Song, "LONG-TERM EVALUATION OF A PARYLENE-BASED MULTI-ELECTRODE ARRAY FOR RECORDINGS FROM THE HIPPOCAMPUS OF BAHAVING RATS," Society for Neuroscience Annual Meeting, San Diego, CA, USA, 2018.

X. Wang, A. Weltman, K. Scholten and E. Meng, "FABRICATION OF PARYLENE MICROFLUIDIC CHANNELS FOR DRUG DELIVERY NEURAL PROBES," BMES Annual Fall Meeting, Atlanta, GA, USA, 2018.

S. Elyahoodayan, C. Larson, E. Meng and D. Song, "ACUTE ELECTROPHYSIOLOGICAL AND DRUG DELIVERY TESTS OF PARYLENE CUFF ELECTRODE WITH EMBEDDED MICROFLUID CHANNELS," Neural Interfaces Conf., Minneapolis, MN, USA, 2018.

A. Baldwin, C. Lee, A. Petrossians, J. Weiland and E. Meng, "PLATINUM-IRIDIUM COATINGS INCREASED SENSITIVITY OF IMPEDANCE-BASED POLYMER FLOW SENSORS," IEEE Engineering in Medicine and Biology Conf., Honolulu, HI, USA, 2018.

J. Ortigoza-Diaz, K. Scholten and E. Meng, "IMPROVEMENT OF DRY AND WET ADHESION IN PARYLENE C TO PLATINUM FOR ROBUST THIN FILM MEDICAL MICRODEVICES," IEEE Engineering in Medicine and Biology Conf., Honolulu, HI, USA, 2018.

C. Larson, S. Elyahoodayan, A. Cobo, K. Scholten, D. Song and E. Meng, "RELIABILITY AND ACUTE IN VIVO TESTING OF THE LYSE-AND-ATTRACT CUFF ELECTRODE," Society for Neuroscience Annual Meeting, San Diego, CA, USA, 2018.

A. W. Hirschberg, H. Xu, K. Scholten, T. W. Berger, D. Song and E. Meng, "TOWARDS HIGH DENSITY PARYLENE NEURAL RECORDING ARRAYS FOR LARGE SCALE RECORDING," IEEE Engineering in Medicine and Biology Conference, Honolulu, HI, USA, 2018.

K. Scholten and E. Meng, “A REVIEW OF IMPLANTABLE BIOSENSORS FOR CLOSED-LOOP DRUG DELIVERY APPLICATIONS,” International Journal of Pharmaceutics, 2018, Vol. 544, Issue 2, pp. 319-334.

2017

A. Baldwin, L. Yu, M. Pratt, K. Scholten, and E. Meng, "PASSIVE, WIRELESS TRANSDUCTION OF ELECTROCHEMICAL IMPEDANCE ACROSS THIN-FILM MICROFABRICATED COILS USING REFLECTED IMPEDANCE," Biomedical Microdevices, vol. 19, p. 87, 2017.

E. Meng, E. Yoon, and C. Gutierrez, "MEMS ENABLED TECHNOLOGIES FOR OCULAR MONITORING AND THERAPY," in Transducers, Kaohsiung, Taiwan, 2017, pp. 379-382.

K. Scholten and E. Meng, "FABRICATION OF FLEXIBLE POLYMER BIO-MEMS WITH SUBMICRON FEATURES," in 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2017, pp. 436-439.

A. W. Hirschberg, H. Xu, K. Scholten, T. W. Berger, D. Song, and E. Meng, "DEVELOPMENT OF AN ANATOMICALLY CONFORMAL PARYLENE NEURAL PROBE ARRAY FOR MULTI-REGION HIPPOCAMPAL RECORDINGS," in 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2017, pp. 129-132.

A. Baldwin and E. Meng, "A KIRIGAMI-BASED PARYLENE C STRETCH SENSOR," in 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2017, pp. 227-230.

A. M. Cobo, B. Boyajian, C. Larson, K. Scholten, V. Pikov, and E. Meng, "A PARYLENE CUFF ELECTRODE FOR PERIPHERAL NERVE RECORDING AND DRUG DELIVERY," in 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2017, pp. 506-509.

R. Sheybani and E. Meng, "MEMS BASED SYSTEMS FOR DRUG DELIVERY," in Drug Delivery -- An Integrated Clinical and Engineering Approach, Y. Rosen, Ed. CRC Press, 2017.

E. Meng, "TOWARDS HIGH DENSITY NEURAL PROBE ARRAYS," in DGIST Global Innovation Festival, Daegu, Korea, 2017.

H. Xu, A. Hirschberg, K. Scholten, D. Song, T. W. Berger and E. Meng, "MULTI-REGION RECORDINGS FROM THE HIPPOCAMPUS OF FREE-MOVING RATS WITH A PARYLENE-BASED MULTI-ELECTRODE ARRAY," Society for Neuroscience, Washington, DC, USA, 2017.

M. Combs, A. Weltman, H. Xu, K. Scholten, D. Song and E. Meng, "IMMUNOHISTOLOGICAL IMAGE ANALYSIS OF MICROPROBE ARRAY TARGETING HIPPOCAMPUS," in BMES Annual Fall Meeting, Pheonix, Arizona, USA, 2017.

J. Ortigoza-Diaz, K. Scholten and E. Meng, "IMPROVEMENT OF WET AND DRY ADHESION IN PARYLENE C MICRODEVICES," in BMES Annual Fall Meeting, Pheonix, Arizona, USA, 2017.

J. Yoo, K. Scholten and E. Meng, "POLYMER PACKAGING FOR INTEGRATED CIRCUITRY IN NEURAL INTERFACES," in IEEE Engineering in Medicine and Biology Conference, Jeju Island, South Korea, 2017.

E. Meng, "PARYLENE NEURAL PROBE ARRAYS FOR LARGE-SCALE, HIGH-DENSITY RECORDING," SPIE Defense + Commercial Sensing, Anaheim, CA, USA, 2017.

H. Xu, A. Weltman, K. Scholten, T. W. Berger, D. Song and E. Meng, "MULTI-REGION RECORDINGS FROM THE RAT HIPPOCAMPUS IN VIVO WITH A FLEXIBLE PARYLENE-BASED MULTI-ELECTRODE ARRAY," IEEE Engineering in Medicine and Biology Conference, Jeju Island, South Korea, 2017.

K. Scholten and E. Meng, "FABRICATION OF FLEXIBLE POLYMER BIOMEMS WITH SUBMICRON FEATURES," IEEE MEMS, Las Vegas, NV, USA, 2017.

2016

S. A. Hara, B. J. Kim, J. T. W. Kuo, C. D. Lee, E. Meng, and V. Pikov, "LONG-TERM STABILITY OF INTRACORTICAL RECORDINGS USING PERFORATED AND ARRAYED PARYLENE SHEATH ELECTRODES,," Journal of Neural Engineering, vol. 13, no. 6, p. 066020, Nov. 2016.

L. Yu, C. A. Gutierrez, and E. Meng, "AN ELECTROCHEMICAL MICROBUBBLE-BASED MEMS PRESSURE SENSOR," Journal of Microelectromechanical Systems, vol. 25, pp. 144-152, 2016.

A. Cobo, R. Sheybani, H. Tu, and E. Meng, "A WIRELESS IMPLANTABLE MICROPUMP FOR CHRONIC DRUG INFUSION AGAINST CANCER," Sensors and Actuators A: Physical, vol. 239, pp. 18-25, 2016.

C. D. Lee, S. A. Hara, L. Yu, J. T. Kuo, B. J. Kim, T. Hoang, V. Pikov, and E. Meng, "MATRIGEL COATINGS FOR PARYLENE SHEATH NEURAL PROBES," Journal of Biomedical Materials Research Part B: Applied Biomaterials, vol. 104, pp. 357-368, 2016.

A. Baldwin, L. Yu, and E. Meng, "AN ELECTROCHEMICAL IMPEDANCE-BASED THERMAL FLOW SENSOR FOR PHYSIOLOGICAL FLUIDS," Journal of Microelectromechanical Systems, vol. 25, pp. 1015-1024, 2016.

B. J. Kim, W. Jin, A. Baldwin, L. Yu, E. Christian, M. D. Krieger, J. G. McComb, and E. Meng, "PARYLENE MEMS PATENCY SENSOR FOR ASSESSMENT OF HYDROCEPHALUS SHUNT OBSTRUCTION," Biomedical Microdevices, vol. 18, p. 87, 2016.

A. Weltman, J. Yoo, and E. Meng, "FLEXIBLE, PENETRATING BRAIN PROBES ENABLED BY ADVANCES IN POLYMER MICROFABRICATION," Micromachines, vol. 7, p. 180, 2016.

K. Scholten and E. Meng, "ELECTRON-BEAM LITHOGRAPHY FOR POLYMER BIOMEMS WITH SUBMICRON FEATURES," Microsystems & Nanoengineering, vol. 2, p. 16053, 2016. (Supplemental Info)

L. Yu and E. Meng, "A DUAL MODE MICROBUBBLE PRESSURE AND FLOW SENSOR," in 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2016, pp. 325-328.

A. Baldwin, L. Yu, and E. Meng, "AN ELECTROCHEMICAL-BASED THERMAL FLOW SENSOR," in 29th International Conference on Micro Electro Mechanical Systems (MEMS), 2016, pp. 341-344.

A. Weltman, H. Xu, K. Scholten, and E. Meng, "DEEP BRAIN TARGETING STRATEGY FOR BARE PARYLENE NEURAL PROBE ARRAYS," in Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, South Carolina, 2016.

L. Yu, E. Pun, and E. Meng, "A CONTACTLESS ELECTROCHEMICAL IMPEDANCE MEASUREMENT METHOD," in Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, South Carolina, 2016.

A. Cobo, K. Scholten, J. Yoo, C. Larson, T. Hudson, V. Pikov, and E. Meng, "A PARYLENE PERIPHERAL NERVE CUFF ELECTRODE WITH INTEGRATED MICROFLUIDICS," in Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, South Carolina, 2016.

K. Scholten and E. Meng, "PARYLENE ENCAPSULATED SUB-MICRON STRUCTURES FOR IMPLANTABLE BIOMEMS," in Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, South Carolina, 2016.

A. Cobo, K. Scholten, J. Yoo, C. Larson, T. Hudson, V. Pikov, and E. Meng, "A PARYLENE CUFF ELECTRODE FOR PERIPHERAL NERVE RECORDING AND STIMULATION," in Neural Interfaces Conference, 2016.

A. Baldwin and E. Meng, "AN IMPEDANCE-BASED THERMAL FLOW SENSOR FOR PHYSIOLOGICAL FLUIDS", BMES Annual Fall Meeting, Minneapolis, 2016

H. Xu, A. Weltman, M. Hsiao, E. Meng, T. W. Berger and D. Song, "THE APPLICATION OF A PARYLENE NEURAL PROBE FOR IN VIVO RECORDINGS FROM MULTIPLE SUBREGIONS OF THE RAT HIPPOCAMPUS," Society for Neuroscience, San Diego, CA, USA, 2016.

A. Baldwin and E. Meng, "AN IMPEDANCE-BASED THERMAL FLOW SENSOR FOR PHYSIOLOGICAL FLUIDS," BMES Annual Fall Meeting, Minneapolis, MN, USA, 2016.

A. Cobo, K. Scholten, V. Pikov and E. Meng, "A PARYLENE-BASED PERIPHERAL NERVE CUFF ELECTRODE," BMES Annual Fall Meeting, Minneapolis, MN, USA, 2016.

K. Scholten, C. Li, H. Yang and E. Meng, "FABRICATION OF HYBRID POLYMER MICRODEVICES WITH THERMOCOMPRESSIVE BONDING," MMB 2016, Seoul, South Korea, 2016.

A. Cobo, R. Sheybani, H. Tu and E. Meng, "A WIRELESS IMPLANTABLE MICROPUMP FOR LOCALIZED DRUG INFUSION," in Sensors and Actuators A-Physical, Vol. 239, pp. 18-25, 2016.

2015

S. A. Hara, B. J. Kim, J. T. Kuo, and E. Meng, "AN ELECTROCHEMICAL INVESTIGATION OF THE IMPACT OF MICROFABRICATION TECHNIQUES ON POLYMER-BASED MICROELECTRODE NEURAL INTERFACES," Journal of Microelectromechanical Systems, vol. 24, pp. 801-809, 2015.

A. Cobo, R. Sheybani, and E. Meng, "MEMS-ENABLED DRUG DELIVERY SYSTEMS," Advanced Healthcare Materials, vol. 4, pp. 969-982, 2015.

R. Sheybani, A. Cobo, and E. Meng, "WIRELESS PROGRAMMABLE ELECTROCHEMICAL DRUG DELIVERY MICROPUMP WITH FULLY INTEGRATED ELECTROCHEMICAL DOSING SENSORS," Biomedical Microdevices, vol. 17, p. 74, 2015.

R. Sheybani and E. Meng, "ACCELERATION TECHNIQUES FOR RECOMBINATION OF GASES IN ELECTROLYSIS MICROACTUATORS WITH NAFION®-COATED ELECTROCATALYST," Sensors and Actuators B: Chemical, vol. 221, pp. 914-922, 2015.

B. J. Kim, C. A. Gutierrez, and E. Meng, "PARYLENE-BASED ELECTROCHEMICAL-MEMS FORCE SENSOR FOR STUDIES OF INTRACORTICAL PROBE INSERTION MECHANICS," Journal of Microelectromechanical Systems, vol. 24, pp. 1534-1544, 2015.

C. D. Lee and E. Meng, "MECHANICAL PROPERTIES OF THIN-FILM PARYLENE–METAL–PARYLENE DEVICES," Frontiers in Mechanical Engineering, vol. 1, p. 10, 2015.

B. J. Kim and E. Meng, "REVIEW OF POLYMER MEMS MICROMACHINING," Journal of Micromechanics and Microengineering, vol. 26, p. 013001, 2015.

B. J. Kim and E. Meng, "MICROMACHINING OF PARYLENE C FOR BIOMEMS," Polymers for Advanced Technologies, 2015.

K. Scholten and E. Meng, "MATERIALS FOR MICROFABRICATED IMPLANTABLE DEVICES: A REVIEW," Lab on a Chip, vol. 15, pp. 4256-4272, 2015.

H. Xu, A. Weltman, M. C. Hsiao, K. Scholten, E. Meng, T. W. Berger, and D. Song, "DESIGN OF A FLEXIBLE PARYLENE-BASED MULTI-ELECTRODE ARRAY FOR MULTI-REGION RECORDING FROM THE RAT HIPPOCAMPUS," in 37th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC), 2015, pp. 7139-7142.

R. Sheybani and E. Meng, "A WIRELESS IMPLANTABLE DRUG INFUSION SYSTEM WITH INTEGRATED DOSING SENSORS," in 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015, pp. 1045-1048.

L. Yu, B. J. Kim, and E. Meng, "AN IMPLANTABLE TIME OF FLIGHT FLOW SENSOR," in 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2015, pp. 620-623.

B. J. Kim, W. Jin, L. Yu, and E. Meng, "MEMS ELECTROCHEMICAL PATENCY SENSOR FOR DETECTION OF HYDROCEPHALUS SHUNT OBSTRUCTION," in 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2015, pp. 662-665.

C. Abrahamsson, H. Zhang, M. Persson, E. Meng and M. Nydén, "A LIQUID FLOW VALVE MADE FROM A FUNCTIONAL COMPOSITE GEL," in International Conference on Advances in Functional Materials, Long Island, NY, USA, 2015.

2014

B. Kim, B. Chen, M. Gupta, and E. Meng, "FORMATION OF THREE-DIMENSIONAL PARYLENE C STRUCTURES VIA THERMOFORMING," Journal of Micromechanics and Microengineering, vol. 24, p. 065003, 2014.

L. Yu, B. J. Kim, and E. Meng, "CHRONICALLY IMPLANTED PRESSURE SENSORS: CHALLENGES AND STATE OF THE FIELD," Sensors, vol. 14, pp. 20620-20644, 2014.

E. Meng and R. Sheybani, "INSIGHT: IMPLANTABLE MEDICAL DEVICES," Lab on a Chip, vol. 14, pp. 3233-3240, 2014.

E. Meng and R. Sheybani, "MICRO-AND NANO-FABRICATED IMPLANTABLE DRUG-DELIVERY SYSTEMS: CURRENT STATE AND FUTURE PERSPECTIVES," Therapeutic Delivery, vol. 5, pp. 1167-1170, 2014.

A. Cobo, H. Tu, R. Sheybani, and E. Meng, "CHARACTERIZATION OF A WIRELESS IMPLANTABLE INFUSION MICROPUMP FOR SMALL ANIMAL RESEARCH UNDER SIMULATED IN VIVO CONDITIONS," in IEEE Biomedical Circuits and Systems Conference (BioCAS), 2014, pp. 348-351.

L. Yu and E. Meng, "A MICROBUBBLE PRESSURE TRANSDUCER WITH BUBBLE NUCLEATION CORE," in 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2014, pp. 104-107.

B. J. Kim, E. P. Washabaugh, and E. Meng, "ANNEALING EFFECTS ON FLEXIBLE MULTI-LAYERED PARYLENE-BASED SENSORS," in 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2014, pp. 825-828.

J. T. Kuo, C. Li, and E. Meng, "FABRICATION AND CHARACTERIZATION OF A MICROFLUIDIC MODULE FOR CHEMICAL GRADIENT GENERATION UTILIZING PASSIVE PUMPING," in 36th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC), 2014, pp. 4415-4418.

R. Sheybani and E. Meng, "ON-DEMAND WIRELESS INFUSION RATE CONTROL IN AN IMPLANTABLE MICROPUMP FOR PATIENT-TAILORED TREATMENT OF CHRONIC CONDITIONS," in 36th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC), 2014, pp. 882-885.

B. J. Kim, L. Yu, E. Christian, M. Krieger, J. G. McComb and E. Meng, "DEVELOPMENT OF AN INTEGRATED MULTI-SENSOR PLATFORM FOR QUANTITATIVE MONITORING OF INTRACRANIAL PRESSURE, CEREBROSPINAL FLUID FLOW, AND VENTRICULAR CATHETER PATENCY," in Annual Meeting of the AANS/CNS Section on Pediatric Neurological Surgery, Amelia Island, FL, USA, 2014.

B. J. Kim, L. Yu, C. Lee and E. Meng, "PARYLENE-BASED EC-MEMS PATENCY SENSOR FOR DETECTION OF HYDROCEPHALUS SHUNT OBSTRUCTION," in BMES Annual Fall Meeting, San Antonio, TX, USA, 2014.

B. J. Kim, L. Yu, C. Lee and E. Meng, "DEVELOPMENT OF A DUAL SENSOR PLATFORM FOR MONITORING HYDROCEPHALUS SHUNTS," in Hydrocephalus 2014, Bristol, UK, 2014.

E. Meng, "ENCAPSULATION OF SMART POLYMERS IN CHRONIC NEURAL INTERFACES," in Neural Interfaces Conference, 2014.

E. Meng, "SCALABLE DRUG INFUSION TECHNOLOGIES," in AAAS Pacific Division 95th Annual Meeting, Riverside, CA, USA, 2014.

T. Hoang and E. Meng, "ELECTROCHEMISTRY OF DRUG RELEASE," in Encyclopedia of Applied Electrochemistry, New York, NY, USA: Springer Reference, 2014.

E. Meng, "THREE DIMENSIONAL PARYLENE SHEATH NEURAL PROBES," in IEEE Engineering in Medicine and Biology Conference, Chicago, IL, USA, 2014.

2013

R. Sheybani, H. Gensler, and E. Meng, "A MEMS ELECTROCHEMICAL BELLOWS ACTUATOR FOR FLUID METERING APPLICATIONS," Biomedical Microdevices, vol. 15, pp. 37-48, 2013.

J. T. W. Kuo, B. J. Kim, S. A. Hara, C. D. Lee, C. A. Gutierrez, T. Q. Hoang, and E. Meng, "NOVEL FLEXIBLE PARYLENE NEURAL PROBE WITH 3D SHEATH STRUCTURE FOR ENHANCING TISSUE INTEGRATION," Lab on a Chip, vol. 13, pp. 554-561, 2013.

B. J. Kim, J. T. W. Kuo, S. A. Hara, C. D. Lee, L. Yu, C. A. Gutierrez, T. Q. Hoang, V. Pikov, and E. Meng, "3D PARYLENE SHEATH NEURAL PROBE FOR CHRONIC RECORDINGS," Journal of Neural Engineering, vol. 10, p. 045002, 2013.

C. Lee, L. Jug, and E. Meng, "HIGH STRAIN BIOCOMPATIBLE POLYDIMETHYLSILOXANE-BASED CONDUCTIVE GRAPHENE AND MULTIWALLED CARBON NANOTUBE NANOCOMPOSITE STRAIN SENSORS," Applied Physics Letters, vol. 102, p. 183511, 2013.

B. J. Kim, B. Chen, M. Gupta, and E. Meng, "THREE DIMENSIONAL TRANSFORMATION OF PARYLENE THIN FILM STRUCTURES VIA THERMOFORMING," in 26th International Conference on Micro Electro Mechanical Systems (MEMS), 2013, pp. 339-342.

J. T. W. Kuo, B. J. Kim, S. A. Hara, C. D. Lee, L. Yu, C. A. Gutierrez, T. Q. Hoang, V. Pikov, and E. Meng, "3D PARYLENE SHEATH PROBES FOR RELIABLE, LONG-TERM NEUROPROSTHETIC RECORDINGS," in 26th International Conference on Micro Electro Mechanical Systems (MEMS), 2013, pp. 1073-1076.

R. Sheybani, S. Elyahoodayan, and E. Meng, "CLOSED-LOOP ON-DEMAND DRUG DELIVERY MICROPUMP FOR CHRONIC PAIN MANAGEMENT APPLICATIONS," in 7th International Conference on Microtechnologies in Medicine and Biology (MMB’13), Marina Del Rey, CA, 2013.

S. A. Hara, J. T. W. Kuo, B. J. Kim, C. D. Lee, L. Yu, C. A. Gutierrez, T. Q. Hoang, and E. Meng, "ELECTROCHEMICAL CHARACTERIZATION OF A 3D PARYLENE SHEATH CORTICAL PROBE," in 7th International Conference on Microtechnologies in Medicine and Biology (MMB’13), Marina Del Rey, CA, 2013.

B. J. Kim, C. A. Gutierrez, and E. Meng, "IN VITRO CHARACTERIZATION OF A PROBE-MOUNTED PARYLENE-BASED PRESSURE SENSOR ARRAY FOR INTRACORTICAL APPLICATIONS," in 7th International Conference on Microtechnologies in Medicine and Biology (MMB’13), Marina Del Rey, CA, 2013.

J. T. W. Kuo, B. J. Kim, S. A. Hara, C. D. Lee, L. Yu, C. A. Gutierrez, T. Q. Hoang, and E. Meng, "ARRAYED 3D PARYLENE SHEATH PROBES FOR NEURAL RECORDINGS," in 7th International Conference on Microtechnologies in Medicine and Biology (MMB’13), Marina Del Rey, CA, 2013.

H. M. Gensler, R. Sheybani, and E. Meng, "A MEMS MICROPUMP SYSTEM WITH ONE-WAY VALVE FOR CHRONIC DRUG DELIVERY," in 7th International Conference on Microtechnologies in Medicine and Biology (MMB’13), Marina Del Rey, CA, 2013, pp. 96-97.

S. A. Hara, B. J. Kim, J. T. Kuo, C. D. Lee, C. A. Gutierrez, T. Hoang, V. Pikov, and E. Meng, "PERFORATED 2×2 PARYLENE SHEATH ELECTRODE ARRAY FOR CHRONIC INTRACORTICAL RECORDING," in 6th International IEEE/EMBS Conference on Neural Engineering (NER), 2013, pp. 645-648.

B. J. Kim, S. A. Hara, B. Chen, J. T. Kuo, C. Lee, C. A. Gutierrez, T. Hoang, M. Gupta, V. Pikov, and E. Meng, "EVALUATION OF POST-FABRICATION THERMOFORMING PROCESS FOR INTRACORTICAL PARYLENE SHEATH ELECTRODE," in 6th International IEEE/EMBS Conference on Neural Engineering (NER), 2013, pp. 379-382.

C. Lee, L. Yu, J. T. Kuo, B. Kim, T. Hoang, and E. Meng, "DRUG ELUTING COATING FOR 3D PARYLENE SHEATH ELECTRODE," in 6th International IEEE/EMBS Conference on Neural Engineering (NER), 2013, pp. 839-842.

T. Hoang, C. Gutierrez, C. Jones, G. Shackleford and E. Meng, "IMPLANTABLE PUMP SYSTEM FOR ON-DEMAND DRUG ADMINISTRATION IN RODENTS," Society for Neuroscience, San Diego, CA, USA, 2013.

S. A. Hara, J. T. W. Kuo, B. J. Kim, C. D. Lee, C. A. Gutierrez, T. Hoang, V. Pikov and E. Meng, "A 2X2 MICROFABRICATED THREE DIMENSIONAL PARYLENE SHEATH MULTISITE ELECTRODE PROBE ARRAY WITH BIOACTIVE COATINGS," Society for Neuroscience, San Diego, CA, USA, 2013.

B. J. Kim, C. A. Gutierrez and E. Meng, "PARYLENE-BASED EC-MEMS SENSOR ARRAY FOR CHRONIC CORTICAL IMPLANT MECHANICS STUDIES," Society for Neuroscience, San Diego, CA, USA, 2013.

C. Lee, L. Yu, J. T. W. Kuo, B. J. Kim, T. Hoang and E. Meng, "MATRIGEL AS A DRUG ELUTING COATING FOR NEURAL PROBES," Society for Neuroscience, San Diego, CA, USA, 2013.

E. Meng, "IMPLANTABLE MICRO INFUSION PUMPS," 2013 CMOSET Research Symposium, Whistler, Canada, 2013.

R. Sheybani, S. Schober and E. Meng, "DRUG DELIVERY USING WIRELESS MEMS," in Handbook of MEMS for Wireless and Mobile Applications, Woodhead Publishing, 2013, ch. 15.

T. Hoang, U. Sinha and E. Meng, "IMPLANTABLE PUMPS INCORPORATING NANOTECHNOLOGY," in The Textbook of Nanoneurosurgery, Taylor and Francis Group, 2013, ch. 20.

S. A. Hara, B. J. Kim, J. T. W. Kuo, C. D. Lee, C. A. Gutierrez, T. Hoang, V. Pikov and E. Meng, "PERFORATED 2X2 PARYLENE SHEATH ELECTRODE ARRAY FOR CHRONIC INTRACORTICAL RECORDING," IEEE EMBS Neural Engineering Conference San Diego, CA, USA, 2013.

2012

E. Meng and T. Hoang, "MICRO- AND NANO-FABRICATED IMPLANTABLE DRUG-DELIVERY SYSTEMS," Therapeutic Delivery, vol. 3, pp. 1457-1467, 2012.

J. T. Kuo, L. Yu, and E. Meng, "MICROMACHINED THERMAL FLOW SENSORS—A REVIEW," Micromachines, vol. 3, pp. 550-573, 2012.

H. Gensler, R. Sheybani, P. Y. Li, R. L. Mann, and E. Meng, "AN IMPLANTABLE MEMS MICROPUMP SYSTEM FOR DRUG DELIVERY IN SMALL ANIMALS," Biomedical Microdevices, vol. 14, pp. 483-496, 2012.

J. T. Kuo and E. Meng, "IMPROVED PROCESS FOR HIGH YIELD 3D INCLINED SU-8 STRUCTURES ON SODA LIME SUBSTRATE TOWARDS APPLICATIONS IN OPTOGENETIC STUDIES," in 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2012, pp. 263-266.

B. J. Kim, C. A. Gutierrez, G. A. Gerhardt, and E. Meng, "PARYLENE-BASED ELECTROCHEMICAL-MEMS FORCE SENSOR ARRAY FOR ASSESSING NEURAL PROBE INSERTION MECHANICS," in 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2012, pp. 124-127.

H. Gensler and E. Meng, "RAPID FABRICATION AND CHARACTERIZATION OF MEMS PARYLENE C BELLOWS FOR LARGE DEFLECTION APPLICATIONS," Journal of Micromechanics and Microengineering, vol. 22, p. 115031, 2012.

J. Kuo, B. Kim, S. Hara, C. Lee, C. Gutierrez, T. Hoang, and E. Meng, "FABRICATION OF 3D PARYLENE SHEATH PROBES FOR RELIABLE NEUROPROSTHETIC RECORDINGS," in Solid State Sensors, Actuators and Microsystems Workshop, Hilton Head, South Carolina, 2012, pp. 30-33.

C. Lee, L. Jug, and E. Meng, "HIGH STRAIN AND BIOCOMPATIBLE SCREEN PRINTED NANOCOMPOSITE BASED CONDUCTIVE PDMS STRAIN SENSORS," in Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, South Carolina, 2012, p. 161.

R. Sheybani, N. E. Cabrera-Munoz, T. Sanchez, and E. Meng, "DESIGN, FABRICATION, AND CHARACTERIZATION OF AN ELECTROCHEMICALLY- BASED DOSE TRACKING SYSTEM FOR CLOSED-LOOP DRUG DELIVERY," in 34th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBS), 2012, pp. 519-522.

S. A. Hara, B. J. Kim, J. T. Kuo, C. Lee, C. A. Gutierrez, T. Hoang, and E. Meng, "PRE-IMPLANTATION ELECTROCHEMICAL CHARACTERIZATION OF A PARYLENE C SHEATH MICROELECTRODE ARRAY PROBE," in 34th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBS), 2012, pp. 5126-5129.

S. A. Hara, B. J. Kim, C. D. Lee, J. T. W. Kuo, C. A. Gutierrez, T. Hoang, and E. Meng, "INVESTIGATION OF POST-FABRICATION THERMOFORMING PROCESSES ON ELECTRODE PROPERTIES USING ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY ON A 3D PARYLENE SHEATH PROBE," in Neural Interfaces Conference, 2012, p. 176.

B. J. Kim, J. T. W. Kuo, S. A. Hara, C. D. Lee, C. A. Gutierrez, T. Hoang, and E. Meng, "3D PARYLENE SHEATH NEURAL PROBE FOR CHRONIC RECORDINGS," in Neural Interfaces Conference, 2012, p. 261.

N. E. Cabrera-Munoz, R. Sheybani and E. Meng, "REAL-TIME DOSE TRACKING AND DEVICE STATUS NOTIFICATION FOR A DRUG MIRCO INFUSION MICROPUMP," in BMES Annual Fall Meeting, Atlanta, GA, USA, 2012.

R. Sheybani, H. Gensler and E. Meng, "ELECTROCHEMICAL DRUG INFUSION MICROPUMP WITH WIDE DYNAMIC RANGE AND VISCOSITY INDEPENDENT PUMPING," in BMES Annual Fall Meeting, Atlanta, GA, USA, 2012.

B. Kim, C. Gutierrez and E. Meng, "PARYLENE-BASED FORCE SENSOR ARRAY TECHNOLOGIES FOR MECHANICAL CHARACTERIZATION OF NEURAL INTERFACES," in BMES Annual Fall Meeting, Atlanta, GA, USA, 2012.

T. Hoang, C. Gutierrez and E. Meng, "REMOTE-CONTROLLED IMPLANTABLE INFUSION PUMPS FOR ON-DEMAND DRUG ADMINISTRATION," Society for Neuroscience, New Orleans, LA, USA, 2012.

S. A. Hara, C. Lee, B. J. Kim, J. T.W. Kuo, C. A. Gutierrez, T. Hoang and E. Meng, "ELECTROCHEMICAL CHARACTERIZATION OF MICROELECTRODES WITH BIOFUNCTIONAL COATINGS ON A PARYLENE C SHEATH CORTICAL PROBE," Society for Neuroscience, New Orleans, LA, USA, 2012.

J. T.W. Kuo, B. J. Kim, S. A. Hara, C. Lee, C. A. Gutierrez, T. Hoang and E. Meng, "3D PARYLENE SHEATH PROBE FOR NEURONAL RECORDING," Society for Neuroscience, New Orleans, LA, USA, 2012.

R. Sheybani, H. Gensler, T. Hoang and E. Meng, "NOVEL WIRELESSLY-OPERATED IMPLANTABLE DRUG INFUSION MICROPUMP FOR ON-DEMAND, SITE-SPECIFIC DELIVERY OF PAIN MEDICATIONS," in World Congress on Pain, Milan, Italy, 2012.

S. A. Hara, B. J. Kim, C. D. Lee, J. T.W. Kuo, C. A. Gutierrez, T. Hoang and E. Meng, "INVESTIGATION OF POST-FABRICATION THERMOFORMING PROCESSES ON ELECTRODE PROPERTIES USING ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY ON A 3D PARYLENE SHEATH PROBE," Neural Interfaces Conference, Salt Lake City, UT, USA, 2012.

S. A. Hara, B. J. Kim, C. D. Lee, J. T.W. Kuo, C. A. Gutierrez, T. Hoang and E. Meng, "3D PARYLENE SHEATH-BASED NEURAL PROBE FOR CHRONIC RECORDINGS," Neural Interfaces Conference, Salt Lake City, UT, USA, 2012.

E. Meng, "GENE DELIVERY USING IMPLANTABLE MEMS DRUG INFUSION PUMPS FOR RADIOSENSITIZATION OF HEAD AND NECK CANCER," European Materials Research Society Spring Meeting, Strasbourg, France, 2012.

T. Hoang and E. Meng, "MICRO- AND NANOTECHNOLOGY ENABLED IMPLANTABLE DRUG DELIVERY SYSTEMS," Therapeutic Delivery, Vol. 3, No. 12, pp. 1457-1467, 2012.

2011

C. A. Gutierrez, C. Lee, B. Kim, and E. Meng, "EPOXY-LESS PACKAGING METHODS FOR ELECTRICAL CONTACT TO PARYLENE-BASED FLAT FLEXIBLE CABLES," in 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011, pp. 2299-2302.

C. A. Gutierrez, R. Sheybani, and E. Meng, "ELECTROCHEMICALLY-BASED DOSE MEASUREMENT FOR CLOSED-LOOP DRUG DELIVERY APPLICATIONS," in 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011, pp. 2839-2842.

R. Sheybani, H. Gensler, and E. Meng, "RAPID AND REPEATED BOLUS DRUG DELIVERY ENABLED BY HIGH EFFICIENCY ELECTROCHEMICAL BELLOWS ACTUATORS," in 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011, pp. 490-493.

H. Gensler, R. Sheybani, and E. Meng, "RAPID NON-LITHOGRAPHY BASED FABRICATION PROCESS AND CHARACTERIZATION OF PARYLENE C BELLOWS FOR APPLICATIONS IN MEMS ELECTROCHEMICAL ACTUATORS," in 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011, pp. 2347-2350.

J. T. W. Kuo, L. Y. Chang, P. Y. Li, T. Hoang, and E. Meng, "A MICROFLUIDIC PLATFORM WITH INTEGRATED FLOW SENSING FOR FOCAL CHEMICAL STIMULATION OF CELLS AND TISSUE," Sensors and Actuators B: Chemical, vol. 152, pp. 267-276, 2011.

W. Li, D. C. Rodger, A. Pinto, E. Meng, J. D. Weiland, M. S. Humayun, et al., "PARYLENE-BASED INTEGRATED WIRELESS SINGLE-CHANNEL NEUROSTIMULATOR," Sensors and Actuators A: Physical, vol. 166, pp. 193-200, 2011.

C. A. Gutierrez and E. Meng, "LIQUID ENCAPSULATION IN PARYLENE MICROSTRUCTURES USING INTEGRATED ANNULAR-PLATE STICTION VALVES," Micromachines, vol. 2, pp. 356-368, 2011.

C. A. Gutierrez and E. Meng, "A SUBNANOWATT MICROBUBBLE PRESSURE SENSOR BASED ON ELECTROCHEMICAL IMPEDANCE TRANSDUCTION IN A FLEXIBLE ALL-PARYLENE PACKAGE," in The 24th IEEE International Conference on Micro Electro Mechanical Systems, 2011, pp. 549-552.

R. Sheybani and E. Meng, "HIGH EFFICIENCY WIRELESS ELECTROCHEMICAL ACTUATORS: DESIGN, FABRICATION AND CHARACTERIZATION BY ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY," in The 24th IEEE International Conference on Micro Electro Mechanical Systems, 2011, pp. 1233-1236.

R. Lo and E. Meng, "REUSABLE, ADHESIVELESS AND ARRAYED IN-PLANE MICROFLUIDIC INTERCONNECTS," Journal of Micromechanics and Microengineering, vol. 21, 2011.

C. A. Gutierrez and E. Meng, "IMPEDANCE-BASED FORCE TRANSDUCTION WITHIN FLUID-FILLED PARYLENE MICROSTRUCTURES," Journal of Microelectromechanical Systems, vol. 20, pp. 1098-1108, 2011.

R. Lo and E. Meng, "A MODULAR HEAT-SHRINK-PACKAGED CHECK VALVE WITH HIGH PRESSURE SHUTOFF," Journal of Microelectromechanical Systems, vol. 20, pp. 1163-1173, 2011.

R. Sheybani, H. Gensler, C. Gutierrez and E. Meng, "WIRELESS FEEDBACK-CONTROLLED DRUG DELIVERY PUMPS FOR SMALL ANIMAL RESEARCH," in Materials Research Society Fall Meeting, Boston, MA, USA, 2011.

2010

S. Saati, R. Lo, P. Y. Li, E. Meng, R. Varma, and M. S. Humayun, "MINI DRUG PUMP FOR OPHTHALMIC USE," Current Eye Research, vol. 35, pp. 192-201, 2010.

C. A. Gutierrez and E. Meng, "SUBNANOWATT MICROBUBBLE PRESSURE TRANSDUCER," in Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, South Carolina, 2010, pp. 57-60.

P. Y. Li, R. Sheybani, C. A. Gutierrez, J. T. W. Kuo, and E. Meng, "A PARYLENE BELLOWS ELECTROCHEMICAL ACTUATOR," Journal of Microelectromechanical Systems, vol. 19, pp. 215-228, 2010.

C. A. Gutierrez and E. Meng, "PARYLENE-BASED ELECTROCHEMICAL-MEMS TRANSDUCERS," Journal of Microelectromechanical Systems, vol. 19, pp. 1352-1361, 2010.

W. Li, D. C. Rodger, E. Meng, J. D. Weiland, M. S. Humayun, and Y. C. Tai, "WAFER-LEVEL PARYLENE PACKAGING WITH INTEGRATED RF ELECTRONICS FOR WIRELESS RETINAL PROSTHESES," Journal of Microelectromechanical Systems, vol. 19, pp. 735-742, 2010.

C. A. Gutierrez and E. Meng, "LOW-COST CARBON THICK-FILM STRAIN SENSORS FOR IMPLANTABLE APPLICATIONS," Journal of Micromechanics and Microengineering, vol. 20, 2010.

P. Y. Li, T. K. Givrad, R. Sheybani, D. P. Holschneider, J. M. I. Maarek, and E. Meng, "A LOW POWER, ON DEMAND ELECTROTHERMAL VALVE FOR WIRELESS DRUG DELIVERY APPLICATIONS," Lab on a Chip, vol. 10, pp. 101-110, 2010.

H. Gensler, R. Sheybani, P. Y. Li, R. Lo, S. Zhu, K. T. Yong, et al., "IMPLANTABLE MEMS DRUG DELIVERY DEVICE FOR CANCER RADIATION REDUCTION," in The 23rd IEEE International Conference on Micro Electro Mechanical Systems, 2010, pp. 23-26.

C. A. Gutierrez, C. McCarty, B. Kim, M. Pahwa, and E. Meng, "AN IMPLANTABLE ALL-PARYLENE LIQUID-IMPEDANCE BASED MEMS FORCE SENSOR," in The 23rd IEEE International Conference on Micro Electro Mechanical Systems, 2010, pp. 600-603.

C. A. Gutierrez and E. Meng, "IMPROVED SELF-SEALING LIQUID ENCAPSULATION IN PARYLENE STRUCTURES BY INTEGRATED STACKABLE ANNULAR-PLATE STICTION VALVE," in The 23rd IEEE International Conference on Micro Electro Mechanical Systems, 2010, pp. 524-527.

U. K. Sinha, R. Maswood, K. T. Yong, I. Roy, P. N. Prasad and E. Meng, "GOLD NANOROD-siRNA NANOCOMPLEXES: A NOVEL THERAPEUTIC TOOL FOR RADIOSENSITIZATION OF HEAD AND NECK CANCER," in American Head and Neck Society Meeting, Las Vegas, NV, USA, 2010.

E. Meng, "Biomedical Microsystems," Boca Raton, FL, USA: FL:CRC Press, 2010.

H. Gensler, R. Sheybani, P.Y. Li, R. Lo, S. Zhu, K. T. Yong, I. Roy, P. N. Prasad, R. Maswood, U. K. Sinha and E. Meng, "IMPLANTABLE MEMS DRUG DELIVERY DEVICES FOR CANCER RADIATION REDUCTION," in MEMS 2010, Hong-Kong, China, 2010, pp. 23-26.

2009

S. Saati, R. Lo, P. Y. Li, E. Meng, R. Varma, and M. S. Humayun, "MINI DRUG PUMP FOR OPHTHALMIC USE," 145th Annual American Ophthalmological Society Meeting, 2009.

R. Lo, P. Y. Li, S. Saati, R. N. Agrawal, M. S. Humayun, and E. Meng, "A PASSIVE MEMS DRUG DELIVERY PUMP FOR TREATMENT OF OCULAR DISEASES," Biomedical Microdevices, vol. 11, p. 959, 2009.

E. Meng, P. Y. Li, R. Lo, R. Sheybani, and C. Gutierrez, "IMPLANTABLE MEMS DRUG DELIVERY PUMPS FOR SMALL ANIMAL RESEARCH," in International Conference of the IEEE Engineering in Medicine and Biology Society, 2009, pp. 6696-6698.

E. Meng and C. Gutierrez, "PARYLENE-BASED ENCAPSULATED FLUID MEMS SENSORS," in International Conference of the IEEE Engineering in Medicine and Biology Society, 2009, pp. 1039-1041.

P. Y. Li, T. K. Givrad, D. P. Holschneider, J. M. I. Maarek, and E. Meng, "A PARYLENE MEMS ELECTROTHERMAL VALVE," Journal of Microelectromechanical Systems, vol. 18, pp. 1184-1197, 2009.

R. Lo and E. Meng, "IN-PLANE BANDPASS REGULATION CHECK VALVE IN HEAT-SHRINK PACKAGING FOR DRUG DELIVERY," in The 22nd IEEE International Conference on Micro Electro Mechanical SystemsMicro Electro Mechanical Systems, 2009, pp. 236-239.

C. Gutierrez, A. Cho, J. Geathers, L. Yu, T. Abram, and E. Meng, "AN IMPLANTABLE LOW-COST MULTILAYER SCREEN-PRINTED CARBON THICK-FILM STRAIN SENSOR," Microtechnologies in Medicine and Biology, Quebec City, 2009.

T. Q. Hoang, L. J. Ho, K. Swertfager, A. Gill, K. Malhotra, C. Jones, J. Chen, and E. Meng, "SURFACE TREATMENT STRATEGIES FOR MICROFLUIDIC DEVICES TOWARDS LONGITUDINAL PC12 NEURONAL CELL STUDIES," Microtechnologies in Medicine and Biology, Quebec City, 2009.

S. Saati, R. Lo, P. Y. Li, E. Meng, R. Varma, and M. S. Humayun, "MINI DRUG PUMP FOR OPHTHALMIC USE," Transactions of the American Ophthalmological Society, vol. 107, pp. 60-71, 2009.

P. Y. Li, R. Sheybani, J. T. W. Kuo, and E. Meng, "A PARYLENE BELLOWS ELECTROCHEMICAL ACTUATOR FOR INTRAOCULAR DRUG DELIVERY," in TRANSDUCERS 2009 - International Solid-State Sensors, Actuators and Microsystems Conference, 2009, pp. 1461-1464.

C. Gutierrez and E. Meng, "A DUAL FUNCTION PARYLENE-BASED BIOMIMETIC TACTILE SENSOR AND ACTUATOR FOR NEXT GENERATION MECHANICALLY RESPONSIVE MICROELECTRODE ARRAYS," in TRANSDUCERS 2009 - International Solid-State Sensors, Actuators and Microsystems Conference, 2009, pp. 2194-2197.

E. Meng, "MICROFLUIDIC INTEGRATION INTO NEURAL IMPLANTS," in BMES Annual Fall Meeting, Pittsburg, PA, USA, 2009.

R. Lo and E. Meng, "MACRO-TO-MACRO FLUIDIC INTERFACES," in Lab on a Chip Technology (Vol. 1): Fabrication and Microfluidics. Norfolk, UK: Caister Academic Press, 2009, ch. 22, pp. 353-369.

T. Q. Hoang, L. J. Ho, K. Swertfager, A. Gill, K. Malhotra, C. Jones, J. Chen and E. Meng, "SURFACE TREATMENT STRATEGIES FOR MICROFLUIDIC DEVICES TOWARDS LONGITUDINAL PC12 NEURONAL CELL STUDIES," MMB 2009, Quebec City, Canada, 2009, pp. 212-213.

2008

P. Y. Li, D. P. Holschneider, J. M. I. Maarek, and E. Meng, "PARYLENE ELECTROTHERMAL MEMS DRUG DELIVERY VALVE," in National Meeting of American Chemical Society, Spring 2008, pp. 941-942.

T. K. Givrad, J. M. I. Maarek, P. Y. Li, E. Meng, N. Sardesai, and D. P. Holschneider, "IMPLANTABLE MINIPUMP WITH MEMS ELECTROTHERMAL VALVE FOR BOLUS INJECTION IN MICE," in ASME 3rd Frontiers in Biomedical Devices Conference, 2008, pp. 35-36.

P. Y. Li, T. K. Givrad, D. P. Holschneider, J. M. I. Maarek, and E. Meng, "A WIRELESSLY-ACTIVATED PARYLENE ELECTROTHERMAL VALVE FOR MAPPING BRAIN FUNCTION IN FREELY MOVING SUBJECTS," in Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, South Carolina, 2008, pp. 32-35.

E. Meng, P. Y. Li, and Y. C. Tai, "PLASMA REMOVAL OF PARYLENE C," Journal of Micromechanics and Microengineering, vol. 18, p. 045004, 2008.

R. Lo, P. Y. Li, S. Saati, R. Agrawal, M. S. Humayun, and E. Meng, "A REFILLABLE MICROFABRICATED DRUG DELIVERY DEVICE FOR TREATMENT OF OCULAR DISEASES," Lab on a Chip, vol. 8, pp. 1027-1030, 2008.

L. Y. Chang, P. Y. Li, L. Zhao, T. Hoang, and E. Meng, "INTEGRATED FLOW SENSING FOR FOCAL BIOCHEMICAL STIMULATION," in 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2008, pp. 921-926.

C. Gutierrez, A. Cho, and E. Meng, "FLEXIBLE CARBON BASED TECHNOLOGIES FOR MEASUREMENT OF MECHANICAL STRAINS IN NEURAL PROSTHESES," in Neural Interfaces Conference, 2008.

G. Mallén-Ornelas, L. Chang, P. Y. Li, T. Hoang, L. J. Ho, K. Swertfager and E. Meng, "FOCAL CHEMICAL STIMULATION OF CELLS WITH A MEMS MICROFLUIDIC PLATFORM," in Neural Interfaces Conference, 2008.

P. Y. Li, J. Shih, R. Lo, S. Saati, R. Agrawal, M. S. Humayun, et al., "AN ELECTROCHEMICAL INTRAOCULAR DRUG DELIVERY DEVICE," Sensors and Actuators A: Physical, vol. 143, pp. 41-48, 2008.

E. Meng, P. Y. Li, and Y. C. Tai, "A BIOCOMPATIBLE PARYLENE THERMAL FLOW SENSING ARRAY," Sensors and Actuators A: Physical, vol. 144, pp. 18-28, 2008.

D. C. Rodger, A. J. Fong, W. Li, H. Ameri, A. K. Ahuja, C. Gutierrez, I. Lavrov, H. Zhong, P. R. Menon, and E. Meng, "FLEXIBLE PARYLENE-BASED MULTIELECTRODE ARRAY TECHNOLOGY FOR HIGH-DENSITY NEURAL STIMULATION AND RECORDING," Sensors and Actuators B: Chemical, vol. 132, pp. 449-460, 2008.

R. Lo and E. Meng, "INTEGRATED AND REUSABLE IN-PLANE MICROFLUIDIC INTERCONNECTS," Sensors and Actuators B: Chemical, vol. 132, pp. 531-539, 2008.

E. Meng, "IMPLANTABLE MEMS DRUG DELIVERY SYSTEMS FOR ADMINISTRATION OF UNALTERED THERAPEUTIC AGENTS," in USC Translational Nanoscience Conference: Re-Engineering Basic and Clinical Research to Catalyze Translational Nanoscience, Los Angeles, 2008.

R. Lo and E. Meng, "CHARACTERIZATION AND FABRICATION OF HIGH-DENSITY, ON-DEMAND, REUSABLE, IN-PLANE POLYMER INTERCONNECTS TOWARDS STANDARDIZED MICROFLUIDIC PACKAGING," in The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 2008, pp. 709-11.

P. Y. Li, T. K. Givrad, D. P. Holschneider, J. M. I. Maarek, and E. Meng, "MECHANICAL AND THERMAL MODELING OF A PARYLENE ELECTROTHERMAL VALVE FOR MAPPING BRAIN FUNCTION IN FREELY MOVING SUBJECTS," in The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS), 2008.

G. Mallén-Ornelas, L. Chang, P. Li, T. Hoang, L. Ho, K. Swertfager, and E. Meng, "A MICROFLUIDIC PLATFORM FOR FOCAL CHEMICAL STIMULATION OF CELLS," in The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS), 2008, pp. 613-5.

P. Y. Li, D. P. Holschneider, J. M. Maarek and E. Meng, "PARYLENE ELECTROTHERMAL VALVES FOR RAPID IN VIVO DRUG DELIVERY," in American Vacuum Society Topical Workshop on BioMEMS, Boston, MA, USA, 2008.

R. Lo and E. Meng, "HIGH-DENSITY REUSABLE IN-PLANE MICROFLUIDIC INTERCONNECTS," in BMES Annual Fall Meeting, St. Louis, MO, USA, 2008.

R. Lo, P. Y. Li, S. Saati, R. Agrawal, M. S. Humayun and E. Meng, "IN VIVO STUDIES DEMONSTRATING FEASIBILITY AND BIOCOMPATIBILITY OF A MEMS OCULAR DRUG DELIVERY SYSTEM," in BMES Annual Fall Meeting, St. Louis, MO, USA, 2008.

C. Gutierrez, A. Cho and E. Meng, "FLEXIBLE CARBON BASED TECHNOLOGIES FOR MEASUREMENT OF MECHANICAL STRAINS IN NEURAL PROSTHESES," in Neural Interface Conference, Cleveland, OH, USA, 2008.

M. S. Humayun and E. Meng, "IMPLANTABLE MEMS DRUG DELIVERY SYSTEMS FOR ADMINISTRATION OF UNALTERED THERAPEUTIC AGENTS," in USC Translational Nanoscience Conference: Re-Engineering Basic and Clinical Research to Catalyze Translational Nanoscience, Los Angeles, CA, USA, 2008.

2007

R. Lo, P.-Y. Li, J. Shih, S. Saati, R. Agrawal, Y.-C. Tai, et al., "REFILLABLE MEMS DRUG DELIVERY PUMP FOR CHRONIC OCULAR DISEASES," Investigative Ophthalmology & Visual Science, vol. 48, pp. 2246-2246, 2007.

S. Saati, R. Lo, P. Y. Li, J. Shih, Y. C. Tai, E. Meng, et al., "SURGICAL METHODS TO PLACE A NOVEL REFILLABLE OCULAR MICROELECTROMECHANICAL SYSTEM (MEMS) DRUG DELIVERY DEVICE," Investigative Ophthalmology & Visual Science, vol. 48, pp. 5791-5791, 2007.

D. C. Rodger, W. Li, H. Ameri, S. Saati, P. Menon, E. Meng, et al., "DUAL-METAL-LAYER PARYLENE-BASED FLEXIBLE ELECTRODE ARRAYS FOR INTRAOCULAR RETINAL PROSTHESES," Investigative Ophthalmology & Visual Science, vol. 48, pp. 657-657, 2007.

H. Yu, L. Ai, M. Rouhanizadeh, R. Hamilton, J. Hwang, E. Meng, et al., "POLYMER-BASED CARDIOVASCULAR SHEAR STRESS SENSORS," in ASME 2nd Frontiers in Biomedical Devices Conference, 2007, pp. 29-30.

P. J. Chen, D. C. Rodger, E. M. Meng, M. S. Humayun, and Y. C. Tai, "SURFACE-MICROMACHINED PARYLENE DUAL VALVES FOR ON-CHIP UNPOWERED MICROFLOW REGULATION," Journal of Microelectromechanical Systems, vol. 16, pp. 223-231, 2007.

P. J. Chen, D. C. Rodger, R. Agrawal, S. Saati, E. Meng, R. Varma, et al., "IMPLANTABLE MICROMECHANICAL PARYLENE-BASED PRESSURE SENSORS FOR UNPOWERED INTRAOCULAR PRESSURE SENSING," Journal of Micromechanics and Microengineering, vol. 17, p. 1931, 2007.

P. Y. Li, J. Shih, R. Lo, B. Adams, R. Agrawal, and S. Saati, "AN ELECTROCHEMICAL INTRAOCULAR DRUG DELIVERY DEVICE," in The 20th IEEE International Conference on Micro Electro Mechanical Systems, 2007, pp. 15-18.

M. Tunc, X. Cheng, B. D. Ratner, E. Meng, and M. Humayun, "REVERSIBLE THERMOSENSITIVE GLUE FOR RETINAL IMPLANTS," Retina, vol. 27, pp. 938-942, 2007.

D. C. Rodger, A. J. Fong, W. Li, H. Ameri, I. Lavrov, H. Zhong, et al., "HIGH-DENSITY FLEXIBLE PARYLENE-BASED MULTIELECTRODE ARRAYS FOR RETINAL AND SPINAL CORD STIMULATION," in TRANSDUCERS 2007 - International Solid-State Sensors, Actuators and Microsystems Conference, 2007, pp. 1385-1388.

R. Lo and E. Meng, "A REUSABLE IN-PLANE POLYMER INTEGRATED MICROFLUIDIC INTERCONNECT," in TRANSDUCERS 2007 - International Solid-State Sensors, Actuators and Microsystems Conference, 2007, pp. 2067-2070.

2006

P. J. Chen, D. C. Rodger, E. Meng, M. S. Humayun, and Y. C. Tai, "SURFACE-MICROMACHINED IN-CHANNEL PARYLENE DUAL VALVES FOR UNPOWERED MICROFLOW REGULATION," in Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, South Carolina, 2006, pp. 4-8.

D. C. Rodger, W. Li, A. J. Fong, H. Ameri, E. Meng, J. W. Burdick, et al., "FLEXIBLE MICROFABRICATED PARYLENE MULTIELECTRODE ARRAYS FOR RETINAL STIMULATION AND SPINAL CORD FIELD MODULATION," in The 4th International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, 2006, pp. 31-34.

W. Li, D. C. Rodger, E. Meng, J. D. Weiland, M. S. Humayun, and Y. C. Tai, "FLEXIBLE PARYLENE PACKAGED INTRAOCULAR COIL FOR RETINAL PROSTHESES," in The 2006 International Conference on Microtechnologies in Medicine and Biology, 2006, pp. 105-108.

R. Lo, K. Kuwahara, P. Y. Li, R. Agrawal, M. S. Humayun, and E. Meng, "A PASSIVE REFILLABLE INTRAOCULAR MEMS DRUG DELIVERY DEVICE," in The 2006 International Conference on Microtechnologies in Medicine and Biology, pp. 74-77.

P. J. Chen, D. C. Rodger, E. Meng, M. S. Humayun, and Y. C. Tai, "IMPLANTABLE UNPOWERED PARYLENE MEMS INTRAOCULAR PRESSURE SENSOR," in The 2006 International Conference on Microtechnologies in Medicine and Biology, pp. 256-259.

E. Meng, J. Shih, P. Y. Li, R. Lo, M. S. Humayun, and Y. C. Tai, "ELECTROLYSIS-DRIVEN DRUG DELIVERY FOR TREATMENT OF OCULAR DISEASE," in The 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 2006, pp. 5-9.

P. J. Chen, D. C. Rodger, R. Agrawal, E. Meng, M. S. Humayun, and Y. C. Tai, "IN VIVO CHARACTERIZATION OF IMPLANTABLE UNPOWERED PARYLENE MEMS INTRAOCULAR PRESSURE SENSORS," in The 10th International Confrerence on Miniaturized Systems for Chemistry and Life Sciences (µTAS), pp. 5-9, 2006.

2005

A. Tooker, E. Meng, J. Erickson, Y. C. Tai, and J. Pine. (2005, Nov-Dec) "BIOCOMPATIBLE PARYLENE NEUROCAGES: DEVELOPING A ROBUST METHOD FOR LIVE NEURAL NETWORK STUDIES," IEEE Engineering in Medicine and Biology Magazine. 30-33.

E. Meng and Y. C. Tai, "PARYLENE ETCHING TECHNIQUES FOR MICROFLUIDICS AND BIOMEMS," in The 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005, pp. 568-571.

E. Meng, P. J. Chen, D. Rodger, Y. C. Tai, and M. Humayun, "IMPLANTABLE PARYLENE MEMS FOR GLAUCOMA THERAPY," in The 3rd IEEE/EMBS Special Topic Conference on Microtechnology in Medicine and Biology, 2005, pp. 116-119.

2004

A. Tooker, E. Meng, J. Erickson, Y. C. Tai, and J. Pine, "DEVELOPMENT OF BIOCOMPATIBLE PARYLENE NEUROCAGES," in The 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, 2004, pp. 2542-2545.

C. Y. Shih, S. Zheng, E. Meng, Y. C. Tai, Y. Liu, and J. F. Stoddart, "NANO-TO-MICRO SELF-ASSEMBLY USING SHEAR FLOW DEVICES," in The 17th IEEE International Conference on Micro Electro Mechanical Systems, 2004, pp. 422-425.

E. Meng, S. Aoyagi, and Y. C. Tai, "HIGH ASPECT RATIO PARYLENE ETCHING FOR MICROFLUIDICS AND BIOMEMS," Special Publication - Royal Society of Chemistry, vol. 297, pp. 401-403, 2004.

C. Y. Shih, S. Zheng, Y. C. Tai, Y. Liu, J. F. Stoddart and E. Meng, "MOLECULAR ASSEMBLY USING SHEAR FLOW DEVICES," MEMS 2004, Maastricht, The Netherlands, 2004, pp. 422-425.

2003

E. Meng and Y. C. Tai, "POLYMER MEMS FOR MICRO FLUID DELIVERY SYSTEMS," Polymer Preprints - America vol. 44, pp. 552-553, 2003.

E. Meng and Y. C. Tai, "A PARYLENE MEMS FLOW SENSING ARRAY," in The 12th International Conference on Transducers, Solid-State Sensors, Actuators and Microsystems, 2003, pp. 686-689.

Q. He, E. Meng, Y. C. Tai, C. M. Rutherglen, J. Erickson, and J. Pine, "PARYLENE NEURO-CAGES FOR LIVE NEURAL NETWORKS STUDY," in TRANSDUCERS 2003 - International Solid-State Sensors, Actuators and Microsystems Conference, 2003, pp. 995-998.

E. Meng, Y. C. Tai, J. Erickson, and J. Pine, "PARYLENE TECHNOLOGY FOR MECHANICALLY ROBUST NEURO-CAGES," Micro Total Analysis Systems, pp. 1109-1112, 2003.

C. Y. Shih, S. Zheng, Y. C. Tai and E. Meng, "LINEAR MOTOR-MOLECULE BIOMIMETIC MUSCLE," BMM Annual Principle Investigators Conference, San Francisco, CA, USA, 2003.

2001

E. Meng, S. Wu, and Y. C. Tai, "SILICON COUPLERS FOR MICROFLUIDIC APPLICATIONS," Fresenius' Journal of Analytical Chemistry, vol. 371, pp. 270-275, 2001.

E. Meng, S. Gassmann, and Y.C. Tai, "A MEMS BODY FLUID FLOW SENSOR," in Micro Total Analysis Systems, 2001, pp. 167-168.

2000

E. Meng, X. Q. Wang, H. Mak, and Y. C. Tai, "A CHECK-VALVED SILICONE DIAPHRAGM PUMP," in The 13th IEEE International Conference on Micro Electro Mechanical Systems, 2000, pp. 62-67.

E. Meng, S. Wu, and Y. C. Tai, "MICROMACHINED FLUIDIC COUPLERS," in Micro Total Analysis Systems, 2000, pp. 41-44.

1999

X. Yang, J. M. Yang, X.Q. Wang, E. Meng, Y.C. Tai, and C.M. Ho, "MICROMACHINED MEMBRANE PARTICLE FILTERS," Sensors and Actuators A: Physical, vol. 73, pp. 184-191, 1999.

1995

C. M. Yang, H. A. Atwater and E. Meng, "LOW TEMPERATURE SELECTIVE NUCLEATION FOR CONTROL OF MICROSTRUCTURE OF GE THIN FILMS ON SIO2," MRS 1995, Boston, MA, USA, 1995.